External cavity laser with a vertically etched silicon blazed grating

Author

Lohmann, A. ; Syms, R.R.A.

Author_Institution

Dept. of Electr. & Electron. Eng., Imperial Coll., London, UK

Volume

15

Issue

1

fYear

2003

Firstpage

120

Lastpage

122

Abstract

An external cavity laser based on a stripe waveguide semiconductor optical amplifier, a ball lens, and a blazed diffraction grating fabricated by vertical deep reactive ion etching of silicon is demonstrated. Bandpass characteristics for a 12th-order grating are given. Tuning of an external cavity laser over a 120-nm spectral range is demonstrated, with a maximum single-mode fiber-coupled power of 1 mW and side-mode suppression ratio of 30 dB.

Keywords

diffraction gratings; laser cavity resonators; laser modes; laser tuning; lenses; micro-optics; optical fabrication; semiconductor optical amplifiers; sputter etching; surface emitting lasers; waveguide lasers; 1 mW; Si; ball lens; bandpass characteristics; blazed diffraction grating; external cavity laser tuning; maximum single-mode fiber-coupled power; side-mode suppression ratio; spectral range; stripe waveguide semiconductor optical amplifier; vertical deep reactive ion etching; vertically etched silicon blazed grating; Etching; Gratings; Laser tuning; Lenses; Optical waveguides; Semiconductor lasers; Semiconductor optical amplifiers; Semiconductor waveguides; Silicon; Waveguide lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2002.805762

Filename

1159082