DocumentCode
1069287
Title
A proposed slotted mask for direct deposition of metal contact pattern on MIS solar cells
Author
Nguyen, Huy Binh ; Nguyen, Hien B.
Author_Institution
University of Miami, Coral Gables, FL, USA
Volume
27
Issue
7
fYear
1980
fDate
7/1/1980 12:00:00 AM
Firstpage
1303
Lastpage
1304
Abstract
It is proposed that by using anisotropic etching of
Keywords
Anisotropic magnetoresistance; Capacitance; Electron devices; Etching; Photonic band gap; Photovoltaic cells; Resists; Silicon; Solid state circuits; Upper bound;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.20027
Filename
1480820
Link To Document