DocumentCode
1069751
Title
Designing response surface model-based run-by-run controllers: a worst case approach
Author
Baras, John S. ; Patel, Nital S.
Author_Institution
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
Volume
19
Issue
2
fYear
1996
fDate
4/1/1996 12:00:00 AM
Firstpage
98
Lastpage
104
Abstract
This paper presents a framework for carrying out run-by-run (RbR) control via a deterministic worst-case approach. In particular the RbR controller developed tries to minimize the worst-case performance of the plant. This yields a methodology for handling uncertainty. A consequence of using the deterministic approach is that we no longer need any assumptions on the statistics of the noise. Rather, what we require is that the noise be bounded. Thus, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares (RLS) based controller
Keywords
Gaussian noise; control system synthesis; electronics industry; model reference adaptive control systems; process control; uncertain systems; uncertainty handling; correlated noise; deterministic worst-case approach; noise statistics; nonGaussian noise; response surface model; run-by-run controllers; semiconductor industry; uncertainty handling; Automatic control; Computer aided software engineering; Control charts; Gaussian noise; Least squares methods; Process control; Response surface methodology; Semiconductor device noise; Statistics; Uncertainty;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
Publisher
ieee
ISSN
1083-4400
Type
jour
DOI
10.1109/3476.507145
Filename
507145
Link To Document