• DocumentCode
    1069751
  • Title

    Designing response surface model-based run-by-run controllers: a worst case approach

  • Author

    Baras, John S. ; Patel, Nital S.

  • Author_Institution
    Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
  • Volume
    19
  • Issue
    2
  • fYear
    1996
  • fDate
    4/1/1996 12:00:00 AM
  • Firstpage
    98
  • Lastpage
    104
  • Abstract
    This paper presents a framework for carrying out run-by-run (RbR) control via a deterministic worst-case approach. In particular the RbR controller developed tries to minimize the worst-case performance of the plant. This yields a methodology for handling uncertainty. A consequence of using the deterministic approach is that we no longer need any assumptions on the statistics of the noise. Rather, what we require is that the noise be bounded. Thus, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares (RLS) based controller
  • Keywords
    Gaussian noise; control system synthesis; electronics industry; model reference adaptive control systems; process control; uncertain systems; uncertainty handling; correlated noise; deterministic worst-case approach; noise statistics; nonGaussian noise; response surface model; run-by-run controllers; semiconductor industry; uncertainty handling; Automatic control; Computer aided software engineering; Control charts; Gaussian noise; Least squares methods; Process control; Response surface methodology; Semiconductor device noise; Statistics; Uncertainty;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1083-4400
  • Type

    jour

  • DOI
    10.1109/3476.507145
  • Filename
    507145