Title :
Highly accurate measurement of sheet thickness: the planar error correction
Author :
Tojo, F. ; Hirakawa, S. ; Toyoda, T. ; Yamagata, K. ; Omura, A. ; Maeji, Y. ; Itoh, M.
Author_Institution :
Interdisciplinary Graduate Sch. of Sci. & Eng., Kinki Univ., Osaka, Japan
fDate :
6/1/2004 12:00:00 AM
Abstract :
In the present study, the authors describe a system using optical and magnetic sensors to measure the thickness of polymer sheets accurately. A newly developed planar error correction method used in the manufacturing process of the sheet is also presented. The system was drastically improved for the precision of measurement of the polymer sheet, resulting in a precision of ±1% or less. As a result, we have succeeded to produce sheets with thickness of 300 μm at a manufacturing process speed of approximately 30 m/min.
Keywords :
error correction; magnetic sensors; measurement errors; optical sensors; polymers; sheet materials; thickness measurement; 2D error map; 300 micron; magnetic sensors; manufacturing process; optical sensors; planar error correction; polymer sheets; sheet thickness measurement; Eddy currents; Error correction; Laser beams; Magnetic sensors; Manufacturing processes; Optical polymers; Optical sensors; Semiconductor lasers; Sensor systems; Thickness measurement; Magnetic sensor; optical sensor; thickness measure; two-dimensional error map;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2004.830868
