DocumentCode :
1072099
Title :
Photographic Ag photodoping of amorphous As2S3films
Author :
Masters, J.I. ; Goldberg, G.M. ; Lavine, J.M.
Author_Institution :
Ionomet Company, Inc., Brighton, MA
Volume :
1
Issue :
4
fYear :
1980
fDate :
4/1/1980 12:00:00 AM
Firstpage :
61
Lastpage :
62
Abstract :
It has been previously shown that negative relief images in As2S3layers can obtain from photodoping of As2S3with silver derived from evaporated silver halide films. In this letter we show that the effective speed of the process can be increased by several orders of magnitude by the addition of a photographic development step to generate a high resolution silver image prior to photodoping. Under these conditions the photodoping is performed by flood rather than imaging light. One of the consequences of the increase in speed is a resolution limited by the Ag halide line structure.
Keywords :
Amorphous materials; Chemicals; Diffusion processes; Etching; Floods; Glass; Image resolution; Optical films; Resistance; Silver;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/EDL.1980.25230
Filename :
1481092
Link To Document :
بازگشت