Title :
Estimation of the in-situ permeabilities in thin-film inductors
Author :
Yamaguchi, M. ; Arakawa, S. ; Yabukami, S. ; Arai, K.I. ; Kumagai, F. ; Kikuchi, S.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
The in-situ average permeabilities of thin film inductors regarding process damages, domain structure, local demagnetizing field and effective air gap in the inductor are investigated. It is estimated that the effective air gaps are most responsible for the values of the in situ permeabilities of a meander-coil type thin film inductor with a closed magnetic circuit
Keywords :
coils; demagnetisation; inductors; magnetic cores; magnetic domains; magnetic permeability; magnetic thin film devices; closed magnetic circuit; domain structure; effective air gap; in-situ average permeabilities; local demagnetizing field; meander-coil type; process damages; thin-film inductors; Copper; Equivalent circuits; Frequency; Inductance; Magnetic analysis; Magnetic cores; Magnetic films; Permeability; Thin film circuits; Thin film inductors;
Journal_Title :
Magnetics, IEEE Transactions on
