DocumentCode
1074702
Title
Optimization of potential profiles in junction charge-coupled devices
Author
Wolsheimer, Evert A.
Author_Institution
Delft University of Technology, Delft, The Netherlands
Volume
28
Issue
7
fYear
1981
fDate
7/1/1981 12:00:00 AM
Firstpage
811
Lastpage
817
Abstract
Experimental results have shown that the junction charge-coupled device (JCCD) can compete with other types of CCD´s in several applications, providing the channel potential can be made sufficiently smooth. Although devices have been fabricated with a charge-transfer intefficiency of 2 × 10-s, the reproducibility was not satisfactory. Two new processes are described for fabricating JCCD´s. By solving the two-dimensional Poisson equation numerically the parameters for the two processes are optimized. Computations for solving the lateral confinement problem of the JCCD have been made. A noncritical methtod is described to define the lateral boundaries of the channel. By simulating complete JCCD cells the influence of gate voltages and charge carriers in the channel was investigated. MOS effects caused by the aluminum interconnection layer on top of the devices also have been taken into account. The accuracy of the simulation method is demonstrated by comparing the results with both a one-dimensional simulation and another two-dimensional simulation which requires more computational effort. Based on the results of the computations JCCD´s will be fabricated. Experiments will be carded out in order to verify the anticipated properties.
Keywords
Atomic layer deposition; Boron; Computational modeling; Dielectric constant; Electrons; MOS capacitors; Potential well; Reproducibility of results; Silicon; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20436
Filename
1481588
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