Title :
Fabrication and Application of Two-Axis Hall Sensor Array Using ELO Film Bonding Technology
Author :
Koh, Keishin ; Kim, Seok Beom ; Hohkawa, Koji
Author_Institution :
Kanagawa Inst. of Technol., Atsugi
fDate :
6/1/2007 12:00:00 AM
Abstract :
In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.
Keywords :
Hall effect devices; barium compounds; high-temperature superconductors; sensor arrays; superconducting devices; superconducting epitaxial layers; yttrium compounds; DC self-magnetic field profile; ELO film bonding technology; Y-Ba-Cu-O; YBCO strip; applied magnetic field; epitaxial lift-off film; two-axis Hall sensor array; Bonding; Fabrication; Magnetic field measurement; Magnetic films; Magnetic sensors; Sensor arrays; Sensor phenomena and characterization; Substrates; Testing; Yttrium barium copper oxide; Bonding; Hall effect devices; semiconductor devices fabrication; superconducting materials measurement;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2007.899041
