Title :
A model for conduction in polycrystalline silicon—Part I: Theory
Author :
Mandurah, Mohammad M. ; Saraswat, Krishna C. ; Kamins, Theodore I.
Author_Institution :
Integrated Circuits Laboratory, Stanford, CA
fDate :
10/1/1981 12:00:00 AM
Abstract :
A new phenomenological model for the electrical conduction in polycrystalline silicon is developed. The combined mechanisms of dopant segregation, carrier trapping, and carrier reflection at grain boundaries are proposed to explain the electrical conduction in polycrystalline silicon. The grain boundaries are assumed to behave as an intrinsic wide-band-gap semiconductor forming a heterojunction with the grains. Thermionic emission over the potential barriers created within the grains due to carrier trapping at the grain boundaries and then tunneling through the grain boundaries is proposed as the carrier transport mechanism. A generalized current-voltage relationship is developed which shows that the electrical properties of polycrystalline silicon depend on the properties of the grain boundaries.
Keywords :
Conductivity; Crystallization; Grain boundaries; Heterojunctions; Optical films; Optical reflection; Semiconductor films; Semiconductor process modeling; Silicon; Thermionic emission;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1981.20504