Title :
Detecting Point Pattern of Multiple Line Segments Using Hough Transformation
Author :
Yuhang Liu ; Shiyu Zhou
Author_Institution :
Ind. & Syst. Eng. Dept., Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
Surface defects in manufacturing often exhibit particular spatial patterns. These patterns contain valuable information about the manufacturing process and can help to identify potential root causes. In this paper, we present a new method to detect the point patterns that consist of multiple line segments. The basic idea is that by using the Hough transformation, we convert the point pattern detection problem into a simple point matching problem. Compared with the existing point pattern matching methods, the proposed method does not require training data and is relatively easy to implement and compute. The details of the detection algorithm are presented and the parameter selection and performance evaluation of this method are investigated. Case studies are presented to validate the effectiveness of this method.
Keywords :
Hough transforms; pattern recognition; Hough transformation; detection algorithm; multiple line segments; parameter selection; performance evaluation; point matching problem; point pattern; Algorithm design and analysis; Manufacturing processes; Noise measurement; Pattern matching; Shape; Strips; Surface treatment; Hough Transform; Hough transform (HT); pattern detection; surface quality control;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2014.2385600