DocumentCode
1075907
Title
IVA-7 surface layer impurity accumulation due to evaporation of GaAs during annealing
Author
Woodall, J. ; Wicks, G. ; Rupprecht, H.
Volume
28
Issue
10
fYear
1981
fDate
10/1/1981 12:00:00 AM
Firstpage
1235
Lastpage
1235
Keywords
Annealing; Chemical vapor deposition; Crystals; Electron mobility; Gallium arsenide; Impurities; Silicon carbide; Substrates; Surface morphology; Temperature sensors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20557
Filename
1481709
Link To Document