DocumentCode :
1076262
Title :
Weighted Data Fusion Use for Ruthenium Dioxide Thin Film pH Array Electrodes
Author :
Liao, Yi-Hung ; Chou, Jung-Chuan
Author_Institution :
Dept. of Inf. Manage., Nat. Yunlin Univ. of Sci. & Technol., Yunlin
Volume :
9
Issue :
7
fYear :
2009
fDate :
7/1/2009 12:00:00 AM
Firstpage :
842
Lastpage :
848
Abstract :
Data fusion is a useful statistical method that can be applied to multiple sensors or array sensors in many fields. The pH value is a very important parameter in clinical diagnosis, industrial wastewater treatment using a hydrogen ion selective electrode or pH meter. In this study, the examined data fusion methods consist of the arithmetic average and weighted data fusion coefficients used to process the measured pH data. A ruthenium dioxide (RuO2) pH electrode was prepared. RuO2 thin films were deposited onto silicon substrate using a sputtering system. Eight RuO2 hydrogen ion selective electrodes were used to form pH array sensors. From the measurement process, we can simultaneously obtain eight data sets. The experimental results, using the data fusion weighted coefficients obtained a good measurement result even when an individual sensor failed within the array sensors.
Keywords :
chemical sensors; electrochemical electrodes; elemental semiconductors; hydrogen ions; pH measurement; ruthenium compounds; sensor arrays; silicon; sputtering; statistical analysis; thin films; RuO2; Si; arithmetic average; array sensor; hydrogen ion selective electrode; pH data measurement; ruthenium dioxide thin film pH array electrode; silicon substrate; sputtering system; statistical method; weighted data fusion coefficient method; Arithmetic; Clinical diagnosis; Electrodes; Hydrogen; Sensor arrays; Sensor fusion; Sputtering; Statistical analysis; Transistors; Wastewater treatment; Array sensor; data fusion; ion selective electrode; ruthenium dioxide; weighted coefficient;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2009.2024045
Filename :
5075731
Link To Document :
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