DocumentCode
1076409
Title
High magnification unstable resonator excimer laser
Author
James, D. ; McKee, Terrence J. ; Skrlac, Walter
Author_Institution
Lumonics Research Limited, Ontario, Canada
Volume
15
Issue
5
fYear
1979
fDate
5/1/1979 12:00:00 AM
Firstpage
335
Lastpage
336
Abstract
High brightness performance has been achieved in a UV preionized transverse discharge KrF excimer laser by using a high magnification unstable resonator configuration. The properties of laser brightness as a function of resonator magnification are examined.
Keywords
Noble-gas lasers; Energy measurement; Laser beams; Laser feedback; Laser modes; Mirrors; Monitoring; Optical feedback; Optical pulses; Optical resonators; Shape measurement;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1979.1070014
Filename
1070014
Link To Document