Title :
Patterned media fabricated by lithography and argon-ion milling
Author :
Kitade, Yasuhiro ; Komoriya, Hitoshi ; Maruyama, Tsugito
Author_Institution :
Magnetic Disk Drive Lab., Fujitsu Labs. Ltd., Atsugi, Japan
fDate :
7/1/2004 12:00:00 AM
Abstract :
Using continuous film prepared by lower gas sputtering, a dot array with a more stable single domain was achieved. The requirements for magnetic properties of patterned media were different from that of perpendicular continuous-film media. The switching field distribution in dot arrays depends on fluctuation in dot size. The smallest size of dot arrays, fabricated by most simple method as lithography and ion-milling, is 50 nm.
Keywords :
ion beam lithography; magnetic recording; sputter etching; argon-ion milling; coercive force; continuous film; dot arrays; dot size; etching; gas sputtering; lithography; magnetic properties; patterned media fabrication; perpendicular continuous-film media; switching field distribution; Argon; Lithography; Magnetic films; Magnetic materials; Magnetic properties; Magnetic switching; Milling; Perpendicular magnetic recording; Shape; Sputtering; Coercive force; etching; lithography; sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.830165