Title :
ELIAD: Efficient Lithography Aware Detailed Routing Algorithm With Compact and Macro Post-OPC Printability Prediction
Author :
Cho, Minsik ; Yuan, Kun ; Ban, Yongchan ; Pan, David Z.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of Texas at Austin, Austin, TX
fDate :
7/1/2009 12:00:00 AM
Abstract :
In this paper, we present an efficient lithography aware detailed (ELIAD) router to enhance silicon image after optical proximity correction (OPC) in a correct-by-construction manner. We first quantitatively show that a pre-OPC litho-metric is highly uncorrelated with a post-OPC metric, which stresses the importance of a post-OPC litho-metric for design-time optimization. We then propose a compact post-OPC litho-metric for a detailed router (DR) based on statistical characterization, where the interferences among predefined litho-prone shapes are captured as a lookup table. Our litho-metric derived from the characterization shows high fidelity to the total edge placement error (EPE) in large scale, compared with Calibre OPC/optical rule check. Therefore, ELIAD powered by the proposed litho-metric can enhance the overall post-OPC printed silicon image. Experimental results on 65-nm industrial circuits show that ELIAD outperforms a rip-up/rerouting approach such as Resolution-enhancement-technique-Aware Detailed Routing with 8times more EPE hot spot reduction and 12times speedup. Moreover, compared with a conventional DR, ELIAD is only about 50% slower.
Keywords :
photolithography; proximity effect (lithography); correct-by-construction; design-time optimization; edge placement error; efficient lithography aware detailed routing algorithm; hot spot reduction; industrial circuits; lookup table; macro post-OPC printability prediction; optical proximity correction; predefined litho-prone shapes; silicon image; Algorithm; lithography; manufacturability; printability; routing; synthesis;
Journal_Title :
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
DOI :
10.1109/TCAD.2009.2018876