DocumentCode :
107755
Title :
Low 
-Number Microlenses for Integration on Optical Microsystems
Author :
Rocha, Rui Pedro ; Belsley, Michael S. ; Higino Correia, Jose ; Carmo, Joao Paulo
Author_Institution :
Dept. of Ind. Electron., Univ. of Minho, Guimaraes, Portugal
Volume :
15
Issue :
7
fYear :
2015
fDate :
Jul-15
Firstpage :
4073
Lastpage :
4075
Abstract :
This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μm. The MLs were fabricated directly on the surface of a die with type n+/p-substrate junction photodiode fabricated in a standard CMOS process. The measured focal length was 49 μm with a tolerance of ±2 μm (maximum error of ±4%), resulting in a numerical aperture of 33.6 × 10-2 (±1.3 × 10-2). The measurements also revealed an f-number of 1.4.
Keywords :
CMOS integrated circuits; integrated optics; microlenses; optical fabrication; p-n junctions; photodiodes; photoresists; AZ4562 photoresist; fabrication process; focal length; low f-number microlenses; n+/p-substrate junction photodiode; optical microsystems; rehydration; size 35 mum to 5 mum; standard CMOS process; thermal reflow; Fabrication; Laser beams; Lenses; Measurement by laser beam; Microoptics; Optical sensors; OPTO; f-number; focal length characterization; micro-optics; microlenses; optical device fabrication;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2014.2385476
Filename :
6995997
Link To Document :
