Title :
A graphical representation of the piezoresistance coefficients in silicon
Author :
Kanda, Yasunari ; Kanda, Yozo
Author_Institution :
Hamamatsu University School of Medicine, Hamamatsu, Japan
fDate :
1/1/1982 12:00:00 AM
Abstract :
The longitudinal and transverse piezoresistance coefficients, Π(300 K), at room temperature are plotted as a function of the crystal directions for orientations in the
Keywords :
Anisotropic magnetoresistance; Capacitive sensors; Germanium; Immune system; Piezoresistance; Process design; Semiconductor impurities; Silicon; Temperature sensors; Tensile stress;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1982.20659
