DocumentCode :
1078356
Title :
An MOS device for AC measurement of surface impedance with application to moisture monitoring
Author :
Garverick, Steven L. ; Senturia, Stephen D.
Author_Institution :
MIT Lincoln Laboratory, Lexington, MA
Volume :
29
Issue :
1
fYear :
1982
fDate :
1/1/1982 12:00:00 AM
Firstpage :
90
Lastpage :
94
Abstract :
A surface impedance measurement (SIM) device fabricated using a metal-gate n-channel depletion-mode MOS process is reported. The device serves as the basis of an ac instrumentation system for the measurement of sheet resistances as high as 1016Ω/square in the frequency range 1 Hz to 10 kHz. Results are presented illustrating the use of the device as a moisture monitor.
Keywords :
Electrical resistance measurement; Electrodes; Impedance measurement; MOS devices; Moisture measurement; Monitoring; Substrates; Surface impedance; Surface resistance; Voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1982.20663
Filename :
1482160
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1078356
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