DocumentCode :
1081530
Title :
IIIB-1 two-dimensional modeling of local oxidation
Author :
Chin, D. ; Dutton, R.W. ; Hu, S.M. ; Oh, S.Y. ; Moll, J.L.
Author_Institution :
Stanford University, CA
Volume :
29
Issue :
10
fYear :
1982
fDate :
10/1/1982 12:00:00 AM
Firstpage :
1677
Lastpage :
1677
Keywords :
Acceleration; Boundary conditions; Boundary value problems; Integral equations; Oxidation; Shape; Silicon; Stress; Temperature; Viscosity;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1982.20962
Filename :
1482459
Link To Document :
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