مرکز منطقه ای اطلاع رساني علوم و فناوري - IIIB-1 two-dimensional modeling of local oxidation

DocumentCode :

1081530

Title :

IIIB-1 two-dimensional modeling of local oxidation

Author :

Chin, D. ; Dutton, R.W. ; Hu, S.M. ; Oh, S.Y. ; Moll, J.L.

Author_Institution :

Stanford University, CA

Volume :

Issue :

fYear :

1982

fDate :

10/1/1982 12:00:00 AM

Firstpage :

1677

Lastpage :

1677

Keywords :

Acceleration; Boundary conditions; Boundary value problems; Integral equations; Oxidation; Shape; Silicon; Stress; Temperature; Viscosity;

fLanguage :

English

Journal_Title :

Electron Devices, IEEE Transactions on

Publisher :

ieee

ISSN :

0018-9383

Type :

jour

DOI :

10.1109/T-ED.1982.20962

Filename :

1482459

Link To Document :