Title :
Micromachined rectangular-coaxial transmission lines
Author :
Reid, J. Robert ; Marsh, Eric D. ; Webster, Richard T.
Author_Institution :
Antenna Technol. Branch, Air Force Res. Lab., Hanscom AFB, MA
Abstract :
Rectangular-coaxial (recta-coax) transmission lines fabricated through a three-dimensional micromachining process are presented. These lines are shown to have significant advantages over competing integrated transmission lines such as microstrip and coplanar waveguides. Design equations are presented for impedance, loss, and frequency range. The equations are confirmed with simulations and measurements. The quality factor of shorted lambda/4 resonators is measured to be 156 at 60 GHz. This corresponds to a line loss of 0.353 dB/cm. Advantages of these lines for passive millimeter-wave circuits including ease of signal routing, high isolation, and signal crossovers are demonstrated with realized lines and couplers
Keywords :
coaxial cables; coplanar waveguides; micromachining; microstrip lines; microstrip resonators; millimetre wave circuits; transmission lines; 60 GHz; coplanar waveguides; microstrip lines; microstrip resonators; millimeter-wave circuits; rectangular-coaxial transmission lines; Coplanar transmission lines; Coplanar waveguides; Equations; Frequency; Impedance; Integrated circuit measurements; Micromachining; Microstrip; Transmission line measurements; Transmission lines; Coplanar waveguides (CPWs); couplers; filters; microstrip; millimeter-wave circuits; resonators;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2006.879133
