Self-Referenced Residual Pressure Measurement Method for Fiber-Optic Pressure Sensor Chip

We propose a direct and nondestructive self-referenced residual pressure measurement method for MEMS chip of fiber-optic pressure sensor. In the proposed method, two multimode fibers are placed at the center and the edge position of the sealed cavity. With scanning external pressure, two groups of cavity lengths data are obtained by using polarization low-coherence interference demodulator. The intersection point of their linear fitting curves indicates that the diaphragm is in flat condition and residual pressure is determined by the external pressure at this point. We successfully demonstrated the effectiveness of the residual pressure measurement method with measure error 0.049 kPa.