DocumentCode
1085437
Title
Promise and challenge of thin-film silicon approaches to active matrices
Author
Lakatos, Andras I.
Author_Institution
Xerox Corporation, Webster, NY
Volume
30
Issue
5
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
525
Lastpage
532
Abstract
This paper reviews the state of the art of laser-annealed crystalline, amorphous, and small-grained polycrystalline Si thin-film transistor arrays built for the addressing of liquid-crystal displays. The fabrication and performance of these arrays are compared with each other and with the more traditional CdSe-type device arrays.
Keywords
Capacitance; Fabrication; Liquid crystal displays; Optical arrays; Semiconductor diodes; Semiconductor thin films; Silicon; Switches; Thin film transistors; Varistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21161
Filename
1483062
Link To Document