DocumentCode :
1085839
Title :
Mathematical implementation of segregation model for two-dimensional process simulation
Author :
Seidl, Albert
Author_Institution :
Technische Universität München, Munich, Germany
Volume :
30
Issue :
6
fYear :
1983
fDate :
6/1/1983 12:00:00 AM
Firstpage :
722
Lastpage :
723
Abstract :
In diffusion models including oxidation, the form of the boundary condition is usually fixed by the segregation model. Papers published on two-dimensional process simulation [2] - [5] have used different boundary conditions for the same underlying segregation model. In this brief a boundary condition is derived and terms neglected by cited authors are discussed.
Keywords :
Boundary conditions; Elasticity; Equations; Impurities; Lead compounds; Mathematical model; Oxidation; Silicon; Two dimensional displays; Viscosity;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1983.21199
Filename :
1483100
Link To Document :
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