Title :
Mathematical implementation of segregation model for two-dimensional process simulation
Author_Institution :
Technische Universität München, Munich, Germany
fDate :
6/1/1983 12:00:00 AM
Abstract :
In diffusion models including oxidation, the form of the boundary condition is usually fixed by the segregation model. Papers published on two-dimensional process simulation [2] - [5] have used different boundary conditions for the same underlying segregation model. In this brief a boundary condition is derived and terms neglected by cited authors are discussed.
Keywords :
Boundary conditions; Elasticity; Equations; Impurities; Lead compounds; Mathematical model; Oxidation; Silicon; Two dimensional displays; Viscosity;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1983.21199