Title :
Narrow-linewidth tunable ArF* excimer-laser source
Author :
White, Jonathan ; Bokor, Jozsef ; Freeman, Richard
Author_Institution :
Bell Laboratories, Holmdel, NJ, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Amorphous materials; Electrons; Gas lasers; Laser modes; Laser theory; Lattices; Optical pulses; Plasma temperature; Semiconductor lasers; Tunable circuits and devices;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070916
