• DocumentCode
    1086294
  • Title

    Equivalent networks for SAW interdigital transducers

  • Author

    Inagawa, Kiyoshi ; Koshiba, Masanori

  • Author_Institution
    Dept. of Electr. Eng., Tomakomai Nat. Coll. of Technol., Japan
  • Volume
    41
  • Issue
    3
  • fYear
    1994
  • fDate
    5/1/1994 12:00:00 AM
  • Firstpage
    402
  • Lastpage
    411
  • Abstract
    An equivalent network approach is described for the analysis of surface-acoustic-wave interdigital transducers. Circuit parameters can he theoretically determined by applying the finite-element method to an infinite array. In this approach, all the effects of piezoelectric perturbation, mechanical perturbation, and energy storage are taken into account, To show the validity and usefulness of this approach, examples are computed for both single- and double-electrode interdigital transducers and one-port resonators. For single- and double-electrode interdigital transducers on 128/spl deg/Y-X LiNbO/sub 3/, X-112/spl deg/Y LiTaO/sub 3/,/sub 45//spl deg/X-Z Li/sub 2/B/sub 4/O/sub 7/, and ST-X quartz substrates, the dependence of excitation characteristics on electrode thickness and metallization ratio is investigated in detail. For a 128/spl deg/Y-XLiNbO/sub 3/ substrate, frequency responses of various one-port resonators are also investigated.<>
  • Keywords
    acoustic arrays; acoustic resonators; equivalent circuits; finite element analysis; frequency response; piezoelectric transducers; surface acoustic wave devices; ultrasonic transducers; Li/sub 2/B/sub 4/O/sub 7/; LiNbO/sub 3/; LiTaO/sub 3/; SAW interdigital transducers; ST-X quartz substrates; SiO/sub 2/; circuit parameters; double-electrode interdigital transducers; electrode thickness; energy storage; equivalent network approach; excitation characteristics; finite-element method; frequency response; infinite array; mechanical perturbation; metallization ratio; one-port resonators; piezoelectric perturbation; single-electrode interdigital transducers; surface-acoustic-wave interdigital transducers; Capacitance; Electrodes; Energy storage; Equivalent circuits; Finite element methods; Frequency; Metallization; Piezoelectric transducers; Surface acoustic waves;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.285476
  • Filename
    285476