Title :
Tunable ultrahigh spectral brightness ArF* excimer laser source
Author :
Egger, Herbert ; Srinivasan, T. ; Hohla, K. ; Scheingraber, H. ; Vidal, Carlos ; Plummer, H.
Author_Institution :
University of Illinois, Chicago, IL, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Brightness; Costs; Laboratories; Laser excitation; Optical pulses; Pulse amplifiers; Pulse compression methods; Pump lasers; Tunable circuits and devices; Xenon;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1070930
