DocumentCode

1086331

Title

Laser-induced oxidation via oxygen-trapping in UV laser-induced amorphous silicon

Author

Liu, Yanbing ; Chiang, S. ; Bacon, F.

Author_Institution

General Electric Res. and Dev. Center, NY, USA

Volume

17

Issue

12

fYear

1981

fDate

12/1/1981 12:00:00 AM

Firstpage

2462

Lastpage

2462

Keywords

Amorphous silicon; Annealing; Electrons; Frequency; Indium phosphide; Laser theory; Masers; Optical pulse generation; Optical pulses; Oxidation;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1981.1070931

Filename

1070931