DocumentCode
1086771
Title
Refinements in the measurement of depleted generation lifetime
Author
Eades, Wendell D. ; Shott, John D. ; Swanson, Richard M.
Author_Institution
Stanford University, Stanford, CA
Volume
30
Issue
10
fYear
1983
fDate
10/1/1983 12:00:00 AM
Firstpage
1274
Lastpage
1277
Abstract
Constant capacitance measurement of bulk generation lifetime using MOS capacitors with a typical desktop computer controlled interface bus measurement system is shown to be practical for medium-and high-lifetime silicon. Refinements to the basic technique are developed to deal with surface generation, diffusion from the neutral bulk, and generation in the lateral surface depletion region.
Keywords
Capacitance measurement; Channel bank filters; Circuits; Computer interfaces; Current measurement; MOS capacitors; Pulse measurements; Silicon; Time measurement; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1983.21286
Filename
1483187
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