Title :
Applications of phase conjugation to photolithography
Author :
Levenson, M. ; Chiang, Karen
Author_Institution :
IBM Research Laboratory, San Jose, CA, USA
fDate :
12/1/1981 12:00:00 AM
Keywords :
Atom lasers; Atomic beams; Atomic measurements; Frequency; Interference; Laser excitation; Laser modes; Laser transitions; Lithography; Pump lasers;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1981.1071023
