DocumentCode :
1088546
Title :
The MISIM-FET in thin semiconductor layers: Depletion-approximation model of I-V characteristics
Author :
Barth, Phillip W. ; Apte, Prakash R. ; Angell, James B.
Author_Institution :
Stanford University, Stanford, CA
Volume :
30
Issue :
12
fYear :
1983
fDate :
12/1/1983 12:00:00 AM
Firstpage :
1717
Lastpage :
1726
Abstract :
Current-voltage equations have been derived for metal-insulator-semiconductor-insulator-metal inversion-type field-effect transistors (MISIM-FET\´s) in thin layers of single-crystal silicon. These dc equations, based on the depletion approximation and the gradual channel approximation, describe the effects of the "back" MIS gate on the "front" MIS channel in the triode region of strong-inversion operation. When the thickness of the silicon is less than twice the depletion depth, the front and back channels can interact. The de effects are a variation in the channel current and drain saturation voltage of one channel with voltage applied to the opposite gate. These models account for front-back channel interactions apparent in the MISIM-FET tetrode structure which cannot be modeled by one-sided MOS theory. In addition, they offer speed and simplicity in calculation or simulation of device characteristics. Preliminary experimental support is provided.
Keywords :
Current-voltage characteristics; Electron mobility; Etching; Fabrication; Permittivity; Predictive models; Sea surface; Semiconductor films; Silicon; Threshold voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1983.21436
Filename :
1483337
Link To Document :
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