Title :
Stacked CMOS SRAM cell
Author :
Chen, C.E. ; Lam, H.W. ; Malhi, S.D.S. ; Pinizzotto, R.F.
Author_Institution :
Texas Instruments, Inc., Dallas, TX
fDate :
8/1/1983 12:00:00 AM
Abstract :
A static random access memory (SRAM) cell with cross-coupled stacked CMOS inverters is demonstrated for the first time. In this approach, CMOS inverters are fabricated with a laser recrystallized p-channel device stacked on top of and sharing the gate with a bulk n-channel device using a modified two-polysilicon n-MOS process. The memory cell has been exercised through the write and read cycles with external signal generators while the output is buffered by an on-chip, stacked-CMOS-inverter-based amplifier.
Keywords :
Circuit testing; Coatings; Etching; Laser modes; MOS devices; Power lasers; Random access memory; Silicon; Thermal stresses; Threshold voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1983.25730