Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

Author

Lee, Kyu J. ; Wawro, Debra ; Priambodo, Purnomo S. ; Magnusson, Robert

Author_Institution

Dept. of Electr. & Comput. Eng., Connecticut Univ., Storrs, CT

Volume

7

Issue

3

fYear

2007

fDate

3/1/2007 12:00:00 AM

Firstpage

409

Lastpage

414

Abstract

A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel´s refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH

Keywords

humidity measurement; humidity sensors; optical sensors; polymer gels; refractive index; silicon compounds; Si₃N₄; agarose-gel; diffractive optical elements; guided-mode resonance effect; photonic relative-humidity sensor; refractive index; resonance humidity sensor; silicon-nitride film; transduction layer; Humidity; Integrated optics; Optical films; Optical refraction; Optical sensors; Optical variables control; Optoelectronic and photonic sensors; Resonance; Semiconductor films; Sensor phenomena and characterization; Agarose gels; diffractive optical elements; guided-mode resonance; humidity sensor; optical sensor; relative humidity;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2006.890129

Filename

4088955