• DocumentCode
    109168
  • Title

    The Evolution of the Optical Emission Pattern From a Pulsed Microwave-Excited Microstrip Split-Ring Resonator Microplasma

  • Author

    Bang-Dou Huang ; Xi-Ming Zhu ; Wen-Cong Chen ; Yi-Kang Pu

  • Author_Institution
    Dept. of Eng. Phys., Tsinghua Univ., Beijing, China
  • Volume
    42
  • Issue
    10
  • fYear
    2014
  • fDate
    Oct. 2014
  • Firstpage
    2772
  • Lastpage
    2773
  • Abstract
    The evolution of the emission pattern of a pulsed microwave-excited microstrip split-ring resonator microplasma at different pressures in argon is presented. When the pressure is lower than ~200 torr, the plasma fills in the gap right after the power is ON. Then, the filaments start to form on a time scale of microseconds to tens of microseconds. When the pressure is higher than ~300 torr, the initial discharge region becomes much smaller with a longer filament development time. No filament is observed in helium and neon up to one atmospheric pressure. It is suggested that the diffusion and localized heating of the electrons determine the evolution of the plasma and the formation of the filaments.
  • Keywords
    argon; helium; high-frequency discharges; neon; plasma diagnostics; plasma heating; plasma sources; plasma transport processes; Ar; He; Ne; atmospheric pressure; diffusion; filament development time; initial discharge region; localized electron heating; optical emission pattern evolution; pressure 1 atm; pulsed microwave-excited microstrip split-ring resonator microplasma; Argon; Discharges (electric); Electromagnetic heating; Microwave FET integrated circuits; Microwave imaging; Optical resonators; Plasmas; Atmospheric-pressure plasmas; Atmospheric-pressure plasmas.;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2014.2320501
  • Filename
    6811200