DocumentCode
109168
Title
The Evolution of the Optical Emission Pattern From a Pulsed Microwave-Excited Microstrip Split-Ring Resonator Microplasma
Author
Bang-Dou Huang ; Xi-Ming Zhu ; Wen-Cong Chen ; Yi-Kang Pu
Author_Institution
Dept. of Eng. Phys., Tsinghua Univ., Beijing, China
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2772
Lastpage
2773
Abstract
The evolution of the emission pattern of a pulsed microwave-excited microstrip split-ring resonator microplasma at different pressures in argon is presented. When the pressure is lower than ~200 torr, the plasma fills in the gap right after the power is ON. Then, the filaments start to form on a time scale of microseconds to tens of microseconds. When the pressure is higher than ~300 torr, the initial discharge region becomes much smaller with a longer filament development time. No filament is observed in helium and neon up to one atmospheric pressure. It is suggested that the diffusion and localized heating of the electrons determine the evolution of the plasma and the formation of the filaments.
Keywords
argon; helium; high-frequency discharges; neon; plasma diagnostics; plasma heating; plasma sources; plasma transport processes; Ar; He; Ne; atmospheric pressure; diffusion; filament development time; initial discharge region; localized electron heating; optical emission pattern evolution; pressure 1 atm; pulsed microwave-excited microstrip split-ring resonator microplasma; Argon; Discharges (electric); Electromagnetic heating; Microwave FET integrated circuits; Microwave imaging; Optical resonators; Plasmas; Atmospheric-pressure plasmas; Atmospheric-pressure plasmas.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2320501
Filename
6811200
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