• DocumentCode
    109253
  • Title

    Improvements to the Volume Measurement of 28Si Spheres to Determine the Avogadro Constant

  • Author

    Kuramoto, Naoki ; Azuma, Yasushi ; Inaba, Hajime ; Feng-Lei Hong ; Fujii, Kenichi

  • Author_Institution
    Nat. Metrol. Inst. of Japan, Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
  • Volume
    64
  • Issue
    6
  • fYear
    2015
  • fDate
    Jun-15
  • Firstpage
    1650
  • Lastpage
    1656
  • Abstract
    In the determination of the Avogadro constant using the X-ray crystal density method with a 28Si-enriched crystal prepared by the International Avogadro Coordination (IAC) project, the volume measurement and surface analysis of 28Si spheres play a crucial role. For accurate volume determination, an optical interferometer has been improved taking account of the geometrical shape of the optical components. Furthermore, a new spectroscopic ellipsometer with a sphere rotation system has been developed for accurate surface analysis. The optical interferometer and the ellipsometer have been used for the volume determination and surface analysis of the 28Si spheres repolished by the IAC, respectively. On the basis of the preliminary uncertainty estimation, the relative standard uncertainty of the apparent volume measurement has been reduced from 4.4 $times 10^{-8}$ to 2.7 $times 10^{-8}$ by the improvement of the interferometer. The number of ellipsometric measurement points on the sphere surface has been increased from 20 to 7782 by the installation of the new ellipsometer, yielding more reliable information on the sphere surface. Details of the improvements and the preliminary results of the measurements of the 28Si spheres are given.
  • Keywords
    constants; elemental semiconductors; ellipsometers; light interferometers; measurement uncertainty; shapes (structures); silicon; volume measurement; 28Si; Avogadro constant determination; IAC; International Avogadro Coordination; X-ray crystal density method; geometrical optical component shape; optical interferometer; preliminary uncertainty estimation; relative standard uncertainty; spectroscopic ellipsometer; sphere rotation system; sphere surface; surface analysis; volume measurement; Measurement by laser beam; Optical interferometry; Optical variables measurement; Silicon; Standards; Uncertainty; Volume measurement; Avogadro constant; diameter measurement; optical interferometer; silicon crystal; spectroscopic ellipsometer; volume measurement; volume measurement.;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.2015.2401212
  • Filename
    7063918