DocumentCode
1099298
Title
A study of the compositional transition layer in In1-x Gax Asy P1-y inP heterojunction interface
Author
Gong, X.C. ; Li, M.D. ; Zhu, R.M. ; Chen, Y.X.
Author_Institution
Shanghai Jiao Tong University, Shanghai, China
Volume
1
Issue
3
fYear
1983
fDate
9/1/1983 12:00:00 AM
Firstpage
483
Lastpage
485
Abstract
The atomic concentration of each composition of a thin quaternary layer grown by the two-phase supercooling LPE does not vary with the depth. The atomic concentration in the compositional transition layer versus the depth can be formulated as a hyperbolic tangent function which fits the experimental data very well.
Keywords
Electron spectroscopy; Indium materials/devices; Atomic layer deposition; Boats; Electrons; Epitaxial growth; Furnaces; Heterojunctions; Indium phosphide; Spectroscopy; Sputtering; Substrates;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/JLT.1983.1072143
Filename
1072143
Link To Document