DocumentCode :
1101536
Title :
Measurement of the effective recombination velocity of semiconductor high-low transitions
Author :
Bellone, Salvatore ; Caruso, Antonio ; Vitale, Gianfranco
Author_Institution :
University of Naples, Naples, Italy
Volume :
32
Issue :
9
fYear :
1985
fDate :
9/1/1985 12:00:00 AM
Firstpage :
1771
Lastpage :
1775
Abstract :
A new method for the measurement of the effective recombination velocity (ERV) of high-low transitions is proposed. The method is based upon a test structure that is easily incorporated in the standard process of bipolar devices. The ERV is directly obtained out of simple dc measurements without any critical parameter involved. The ERV can be measured over a wide range of injection levels and its two main components, namely the one due to the high-doped layer and the one due to the retarding region of the transition, can be easily separated from each other.
Keywords :
Circuit testing; Current measurement; Doping profiles; Fabrication; Helium; Radiative recombination; Semiconductor diodes; Semiconductor process modeling; Thickness measurement; Velocity measurement;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1985.22195
Filename :
1484941
Link To Document :
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