• DocumentCode
    1101940
  • Title

    An approach to solving multiparticle diffusion exhibiting nonlinear stiff coupling

  • Author

    Yeager, Hal R. ; Dutton, Robert W.

  • Author_Institution
    Stanford University, Stanford, CA
  • Volume
    32
  • Issue
    10
  • fYear
    1985
  • fDate
    10/1/1985 12:00:00 AM
  • Firstpage
    1964
  • Lastpage
    1976
  • Abstract
    A methodology for handling a class of stiff multiparticle parabolic PDE´s in one and two dimensions is presented. The particular example considered in this work is the interaction and diffusion of two point defects in silicon, interstitials and vacancies. Newton´s method, latency techniques, and second-order time-stepping approaches all contribute in significantly reduced computation times. A general class of diffusion-reaction problems is defined and conditions under which the corresponding Newton matrix is invertible and Newton´s method converges to a globally unique solution are derived. The convergence properties of the purely reactive system are also derived and compared to those given by a Picard iteration. Application of basic iterative matrix techniques for the general diffusion-reaction system is discussed and specific numerical examples of point defect kinetics are given.
  • Keywords
    Couplings; Delay; Diffusion processes; Equations; Gallium arsenide; Kinetic theory; Oxidation; Semiconductor process modeling; Silicon; Throughput;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1985.22229
  • Filename
    1484975