Millimeter-Wave Silicon-on-Glass Integrated Tapered Antenna

This letter presents a millimeter-wave (mmW) high-efficiency tapered dielectric antenna, which is designed and fabricated on a new integrated technology platform called silicon-on-glass (SOG). The antenna is fabricated using photolithography and dry etching of the Si layer of the SOG wafer. The proposed antenna advantages include high efficiency, low-cost fabrication with high precision, and small size. Experimental results are presented to validate the new design concept, which is optimized for low sidelobe, high gain, and short length.