DocumentCode
1104187
Title
Tradeoffs and electron temperature calculations in lightly doped drain structures
Author
Frey, J. ; Goldsman, N.
Author_Institution
Cornell University, Ithaca, NY
Volume
6
Issue
1
fYear
1985
fDate
1/1/1985 12:00:00 AM
Firstpage
28
Lastpage
30
Abstract
Physical explanations are presented for why lightly doped drain (LDD) structures may be both good, in that they reduce parasitic gate currents; and bad, in that they lead to a decrease, of transconductance with time. The former effect is related to the reduction peak electric fields by the LDD profile, and the exponential dependence of gate currents on these fields; the latter effect may be related to the filling of a fixed density of available states over a larger fraction of the channel in the LDD device, resulting in a decrease in channel conductance. A physically based method for calculating electron temperatures in MOSFET channels, and ways of using this method for assessing the tradeoffs involved in LDD design, are also presented.
Keywords
Current measurement; Degradation; Doping profiles; Electron traps; Filling; MOSFET circuits; Semiconductor process modeling; Temperature; Transconductance; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1985.26031
Filename
1485184
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