Variation of MIM damascene capacitor HF performance evolving from 2D to 3D architectures

High-frequency (HF) characterisations of 2D and 3D metal-insulator-metal (MIM) damascene capacitors are presented focusing on the impact of the MIM architecture on the HF performance of capacitors integrated in the back end of line with Si₃N₄ as the insulating material. Dedicated test structures were integrated and HF characterisation methods developed. Results show that properties (parasitic inductance and cutoff frequency) of MIM capacitors improve with the 3D architecture.