Deposition and piezoelectric characteristics of ZnO films by using an ECR sputtering system

Author

Kadota, Michio ; Kasanami, Toru ; Minakata, Makoto

Author_Institution

Murata Manuf. Co. Ltd., Kyoto, Japan

Volume

41

Issue

4

fYear

1994

fDate

7/1/1994 12:00:00 AM

Firstpage

479

Lastpage

483

Abstract

Piezoelectric properties of ZnO films, were investigated by using an Electron Cyclotron Resonance (ECR) sputtering system. It was confirmed that this system was capable of depositing a ZnO film with a large specific resistance, and good c-axis orientation on an interdigital transducer (IDT)/glass substrate at a low temperature (less than 200/spl deg/C) and in a low gas pressure (/spl sim/10/sup -4/ torr). Furthermore, these ZnO films exhibited excellent SAW characteristics (insertion losses) and effective electromechanical coupling factors (k/sub eff/) compared with ZnO films deposited by a conventional RF magnetron sputtering system. Further, this ECR sputtering system was capable of depositing a ZnO film, without heating the substrate, that was capable of propagating a Rayleigh SAW at 700 MHz for the first time.<>

Keywords

losses; piezoelectric thin films; sputter deposition; sputtered coatings; surface acoustic waves; ultrasonic propagation; zinc compounds; 1*10/sup -4/ torr; 200 C; 700 MHz; ECR sputtering system; IDT/glass substrate; Rayleigh SAW; SAW characteristics; ZnO; ZnO films; c-axis orientation; electromechanical coupling factors; electron cyclotron resonance; insertion losses; interdigital transducer; piezoelectric characteristics; Cyclotrons; Electrons; Glass; Piezoelectric films; Piezoelectric transducers; Resonance; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.294108

Filename

294108