DocumentCode
1111013
Title
VA-5 Monolithic integration of GaAs/AlGaAs double-heterostructure LED´s and Si MOSFET´s
Author
Choi, H.K. ; Turner, G.W.
Volume
33
Issue
11
fYear
1986
fDate
11/1/1986 12:00:00 AM
Firstpage
1857
Lastpage
1858
Keywords
Electron devices; Fabrication; Gallium arsenide; Light emitting diodes; MOSFET circuits; Metallization; Monolithic integrated circuits; Sputter etching; Substrates; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1986.22807
Filename
1486024
Link To Document