DocumentCode :
1119080
Title :
Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler
Author :
Joo, Yong-jae ; Lee, Tae-Eog
Author_Institution :
Dept. of Ind. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea
Volume :
11
Issue :
3
fYear :
2004
Firstpage :
33
Lastpage :
49
Abstract :
In this paper, a systematic practice for verifying a scheduler and a CTC using a virtual cluster tool (VCT) model are presented, which emulates the operational behavior of a real cluster tool with high fidelity. The model architecture and modeling strategies of the VCT were also explained. This paper also presented the use of a formal model-based automatic error-detection technique and discussed experiences of verifying a real cluster tool controller using the VCT.
Keywords :
control engineering computing; materials handling; process control; scheduling; semiconductor device manufacture; virtual manufacturing; cluster tool controller; formal model-based automatic error-detection technique; scheduler verification; virtual cluster tool; virtual control; Automatic control; Communication system control; Control systems; Delay; Job shop scheduling; Process control; Robot kinematics; Robotics and automation; Service robots; Testing;
fLanguage :
English
Journal_Title :
Robotics & Automation Magazine, IEEE
Publisher :
ieee
ISSN :
1070-9932
Type :
jour
DOI :
10.1109/MRA.2004.1337825
Filename :
1337825
Link To Document :
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