• DocumentCode
    112186
  • Title

    Detection Technique With Alpha-Tracking and Emissivity Comparison

  • Author

    Mori, Hisamichi ; Uemura, Toshifumi ; Matsuyama, Hiroki ; Yamazaki, Tsutomu ; Soeda, Takeshi

  • Author_Institution
    Fujitsu Semicond. Ltd., Tokyo, Japan
  • Volume
    61
  • Issue
    6
  • fYear
    2014
  • fDate
    Dec. 2014
  • Firstpage
    3438
  • Lastpage
    3442
  • Abstract
    We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10-2 alphas/kh-cm2 using a normal detector. We measured various large-scale integration materials using this technique.
  • Keywords
    alpha-particle effects; alpha emissivity measurement; alpha-tracking; background effect; detection limit; detection technique; emissivity comparison; large-scale integration materials; Alpha particles; Radiation detectors; Resins; Sensitivity; Single event upsets; Alpha-emissivity; Columbia resin 39 (CR-39); alpha-tracking; low background;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.2014.2359472
  • Filename
    6926872