Title :
A capacitance sensor for on-line monitoring of ultrathin polymeric film growth
Author :
Zhou, G.-G. ; Kowel, S.T. ; Srinivasan, M.P.
Author_Institution :
California Univ., Davis, CA, USA
fDate :
6/1/1988 12:00:00 AM
Abstract :
An interdigitated metallic electrode array fabricated using standard photolithography and wet-etching techniques, is applied as a capacitance sensor. A theoretical model is developed which predicts a sensitivity of approximately 2 fF/monomolecular layer, well within the detection capability of modern digital bridges. Experimental data from Langmuir/Blodgett depositions of organic and polymeric films accurately confirm the theoretical predictions. The sensors have also provided the first real-time measurements of water exclusion from such films
Keywords :
Langmuir-Blodgett films; capacitance measurement; electric sensing devices; polymer films; Langmuir/Blodgett depositions; capacitance sensor; interdigitated metallic electrode array; on-line monitoring; real-time measurements; standard photolithography; ultrathin polymeric film growth; water exclusion; wet-etching techniques; Bridge circuits; Capacitance measurement; Capacitive sensors; Dielectric substrates; Electrodes; Glass; Monitoring; Optical films; Polymer films; Sensor arrays;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
