Title :
Postbreakdown current in MOS structures: extraction of parameters using the Integral difference function method
Author :
Miranda, Enrique ; Ortiz-Conde, Adelmo ; Garcia-Sanchez, Francisco J. ; Farkas-Sosa, Eduardo
Author_Institution :
Dept. d´´Enginyeria Electron., Univ. Autonoma de Barcelona, Bellaterra
fDate :
6/1/2006 12:00:00 AM
Abstract :
This paper deals with the extraction of parameters and simulation of the postbreakdown leakage current in pMOS devices with ultrathin oxides. The model considered is based on the generalized diode equation, i.e., a diode-like equation with series resistance. The current-voltage (I-V) characteristic can be expressed in a closed-form expression, which makes it is suitable for circuit simulation environments. Model parameters are extracted using the integral difference function (IDF) method. Because the exact expression for the I-V characteristic is used for computing the IDF, the method does not involve any kind of approximation. The effect of including a nonlinear correction term to the voltage drop across the structure is also discussed
Keywords :
MIS devices; difference equations; integro-differential equations; leakage currents; semiconductor device breakdown; semiconductor device models; MOS structures; circuit simulation; current-voltage characteristic; diode equation; integral difference function; model parameters; oxide breakdown; pMOS devices; parameter extraction; postbreakdown leakage current; ultrathin oxides; Circuit simulation; Closed-form solution; Dielectric breakdown; Diodes; Electric breakdown; Integral equations; Leakage current; MOS devices; Stress; Voltage; MOS; oxide breakdown; reliability;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2006.876563