Title :
Microaperture measurement system
Author_Institution :
Borg-Warner Corp., Des Plaines, IL, USA
fDate :
6/1/1967 12:00:00 AM
Keywords :
Apertures; Diffraction; Interference; Laser beams; Lasers and electrooptics; Length measurement; Light sources; Ring lasers; Shape measurement; Size measurement;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1967.1074537
