Title :
Plasma Bubble in an RF Reactor
Author :
Sigeneger, Florian ; Basner, Ralf ; Loffhagen, Detlef ; Kersten, Holger
Author_Institution :
Leibniz-Inst. fur Plasmaforschung und Technol. e.V., Greifswald
Abstract :
A pronounced local enhancement of the argon plasma of the capacitively coupled reactor PULVA-INP is generated by applying an additional RF voltage at the central pixel (CP) of its adaptive electrode. This enhancement is observed by a large increase of the light-emission intensity. A 2-D fluid model is applied to describe the plasma in this reactor configuration. A pronounced change of the electric potential and a large increase of the electron density are obtained around the CP. The spatial structure of the increased excitation rate of argon corresponds to the observed light emission.
Keywords :
electron density; high-frequency discharges; plasma density; 2-D fluid model; RF reactor; argon plasma; capacitively coupled reactor; electric potential; electron density; excitation rate; light-emission a intensity; plasma bubble; spatial structure; Adaptive electrode (AE); RF reactor; fluid model;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.920898
