• DocumentCode
    1127747
  • Title

    Modeling and Optimization of the Deposition of Shape Memory Polymers for Information Storage Applications

  • Author

    Wornyo, Edem ; May, Gary S. ; Gall, Ken

  • Author_Institution
    Syst. & Technol. Group, IBM Microelectron., Hopewell Junction, NY, USA
  • Volume
    22
  • Issue
    3
  • fYear
    2009
  • Firstpage
    409
  • Lastpage
    416
  • Abstract
    Shape memory polymers are of interest as high-capacity information storage media. This paper seeks to understand the effects of processing conditions on diethylene glycol dimethacrylate (DEGDMA) and bisphenol A ethoxylate dimethacrylate. Full factorial experiments are performed to characterize the impact of the following parameters: spin speed, spin time, and nitrogen flow rate. A total of ten experiments are conducted. The measured responses are film thickness, uniformity, hardness and modulus. Analysis of variance reveals the above input parameters are significant with respect to the output responses. The full factorial experiment is augmented by a central composite face centered (CCF) design to facilitate process modeling. Neural network models are developed to examine relationships. The average predictability of the models is better than 2% for training and less than 15% in testing. Genetic algorithms are used in optimizing recipes for the two materials.
  • Keywords
    genetic algorithms; hardness; neural nets; optimisation; polymer films; shape memory effects; storage media; bisphenol A ethoxylate dimethacrylate; central composite face centered design; diethylene glycol dimethacrylate; film thickness; full factorial experiments; genetic algorithm; hardness; information storage applications; neural network; nitrogen flow rate; optimization; shape memory polymers; spin speed; spin time; Genetic algorithms; MEMS; nanotechnology; neural networks; optimization; shape memory polymers;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2009.2024902
  • Filename
    5159412