DocumentCode :
1131162
Title :
Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines
Author :
Wang, Yannan ; Ke, Min ; Lancaster, Michael J.
Author_Institution :
Sch. of Eng., Univ. of Birmingham, Birmingham
Volume :
3
Issue :
1
fYear :
2009
fDate :
2/1/2009 12:00:00 AM
Firstpage :
125
Lastpage :
129
Abstract :
Micromachined, multilayer cavity resonators and filters at 38 GHz are demonstrated. Each layer is made of gold-coated silicon, structured by deep reactive etching. Two external coupling structures by coaxial feed lines are proposed to suit the fabrication process. The measured resonator gives an unloaded Q-value of 343 at 38 GHz. Methods to further improve the resonator quality-factors are discussed. The measured insertion loss of the filter is 1.01 dB, the 3 dB bandwidth is from 36.53 to 39.13 GHz, and the return loss is better than 15 dB over the frequency range from 37.0 to 38.6 GHz.
Keywords :
cavity resonator filters; coaxial cables; bandwidth 36.53 GHz to 39.13 GHz; deep reactive etching; filter; frequency 37.0 GHz to 38.6 GHz; loss 1.01 dB; micromachined cavity resonator; quality-factors; rectangular-coaxial feed-lines;
fLanguage :
English
Journal_Title :
Microwaves, Antennas & Propagation, IET
Publisher :
iet
ISSN :
1751-8725
Type :
jour
DOI :
10.1049/iet-map:20080011
Filename :
4768610
Link To Document :
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